IDC Micro Inspection helps laboratories, R&D teams, semiconductor manufacturers and inspection engineers turn manual microscope work into repeatable, recipe-based, automated inspection and documentation workflows.
Keyence VHX automationWafer inspectionLarge-area stitchingAPI integrationCustom fixtures
ScanX automates Keyence VHX microscope workflows with recipes, position lists, scan maps, autofocus/depth-composition mapping, fiducial/reference mark handling, customizable naming, and automated image acquisition.
Image browsing, classification, annotation, graphical programming, wafer-map handling and review of very large stitched images.
Offline post-processing and stitching of VHX scans on separate computers, keeping the microscope available for the next inspection task.
Multi-zone wafer vacuum chuck and universal bread board solutions for the Keyence VHX SL1 stage, supporting practical sample handling and wafer inspection setups.
Recipes and linked position lists help standardize microscope operation, reduce operator dependency and make recurring inspection tasks easier to reproduce.
Position-list handling, reference mark adjustment, simplified INF map support and unlimited stitching are especially useful for wafers, panels, devices and repeated inspection areas.
The HTTP REST API allows customers to control ScanX from external programs and scripts, including Python and MATLAB.
Offline stitching and post-processing keeps the microscope free while data is processed on another computer.
IDC Micro Inspection lists control support for Keyence VHX X1, VHX-7000N with VHX-7100 or VHX-7020, Keyence SL1 and S750E stages, selected Aerotech and Peak Metrology stages, IDC MI-300 with VK-S1000K, and Prior Scientific stages/controllers.